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E5262A/E5263A Channel IV Analyzer/Source Monitor Unit

Data Sheets

Introduction

Keysight Technologies, Inc. E5262A and E5263A 2ch IV Analyzers are the low cost solution for current-voltage characterization. The E5262A and E5263A support two channels of SMUs (Source/ Monitor Units) for voltage/current sourcing and voltage/current measurement with the best in the class current measurement performance as low as 5 pA. The EasyEXPERT group+ GUI based characterization software is furnished and available on your PC to support all the tasks required in the characterization from the measurement setup to the data analysis. Powerful integration of SMU’s versatile measurement capabilities and GUI based characterization software makes the E5262A and E5263A the best solutions for characterization and evaluation of two or three terminal devices such as materials and active/passive components with uncompromised measurement reliability and efficiency.

Keysight EasyEXPERT group+ supports efficient and repeatable device characterization in the entire characterization process from measurement setup and execution to analysis and data management either by interactive manual operation or automation across a wafer in conjunction with a semiautomatic wafer prober. EasyEXPERT group+ makes it easy to

perform current-voltage characterization immediately with the intuitive GUI based operation and allows you the option of storing test condition and measurement data automatically after each measurement in a unique built-in database (workspace), ensuring that valuable information is not lost and that measurements can be repeated at a later date. Keysight E5262A/E5263A provides the convenient low cost solution for current-voltage characterization with these versatile capabilities.

In addition to using as an analyzer, the E5262 and E5263A are available as a system component SMU for a rack and stuck test system. It provides the high throughput and expandability for current-voltage measurement at low cost. It can be controlled remotely by the FLEX command set supporting the powerful measurement capabilities.

Basic Features

Current-voltage measurement capabilities

- Accurate and precision measurement ranges.

- E5262A: 5 pA – 200 mA/100 μV – 100 V

- E5263A: 5 pA – 1 A/100 μV – 200 V

- Spot and sweep measurement capabilities

- Pulse spot and sweep measurement with minimum 500 μs pulse width

EasyEXPERT group+ software

- Characterization environment is available on user’s PC

- Intuitive GUI based operation with keyboard and mouse operation

- Application Test mode provides the furnished ready-to-use application tests for quick measurement execution (Available application tests can be adapted to configured resources.)

- Classic test mode provides easy access to the instrument features

- Graphical display and analysis capabilities facilitate front-end data analysis without additional utilities and support report generation as image data or Excel data.

- Individualized built-in database (workspace) records test data automatically and simplifies the data management without annoying numerous data files.

- Quick test mode supports test sequencing without programming

- GUI-based control of the Keysight B2200A, B2201A and E5250A switching matrices

- EasyEXPERT remote control function supports the remote execution of application tests via the LAN interface

- Data back capability and various data protection feature for shared usage by multiple users

- EasyEXPERT group+ can be installed on as many PCs as you need without additional charge to take advantage of offline personal analyzer environment among users in your department.

E5262A/E5263A hardware

- Pre-fixed configuration of 2 channel SMUs

- E5262A is configured with two Medium Power SMUs (MPSMUs).

- E5263A is configured with a High Power SMU (HPSMU) and a Medium Power SMU (MPSMU).

- High-speed analog-to-digital converter (ADC) is available.

- Active ground unit (GNDU) in mainframe to force 0 V and sink the current up to 2.2 A

- Multiple interfaces (GPIB, trigger in/out and digital I/O)

- FLEX command set and program memory for remote control programming

- Self-test, self-calibration and diagnostics functions

Hardware

Specification conditions

The measurement and output accuracy are specified at the module connector terminals when referenced to the Zero Check terminal under the following conditions:

1. Temperature: 23°C ± 5°C (double for 5°C to 18°C, and 28°C to 40°C if not noted otherwise)

2. After 40 minutes warm-up

3. Ambient temperature change less than ± 1°C after auto calibration execution

4. Measurement made within one hour after auto calibration execution

5. Averaging (high-speed per-SMU ADC): 128 samples in 1 PLC; Integration time

6. Filter: ON (for SMUs)

7. Kelvin connection

8. Calibration period: 1 year

Maximum output power

There are no power restrictions on the E5262A and E5263A main­frames. Both mainframes support having both of their modules simultaneously output maximum voltage or current.

Maximum voltage between common and ground

Maximum common to ground voltage must be ± 42 V

Pulse measurement

Pulse width: 500 μsec to 2 s

Pulse period: 5 ms to 5 s

Period ≥ width + 2 ms (when width ≤ 100 ms)

Period ≥ width + 10 ms (when width > 100 ms)

Pulse resolution: 100 μs

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