Analysis of Materials Physical Properties

Analysis of Materials Physical Properties

The nano-scale morphology and electromagnetic

property measurement solution

Electric/magnetic field, morphology, etc. in a variety of environments

“Want to verify degree of perfection for semiconductor process?”

“Want to imaging corrosion of the metal at nano-scale?”

“Want to observe morphology in a variety of environments and temperature?”

Yes, we can support for you!

Non-destructive failure analysis of semiconductor

Electrical property verification is available.

With Keysight’s network analyzer, in addition to surface morphology, imaging of carrier concentration is also available with SMM*1. This helps verification of the semiconductor process for SRAM, LED, solar cell, etc.

*1 SMM : Scanning Microwave Microscopy

20yrs+ of expertise in Electrochemical SPM

In-situ observation of electrochemical process is available. Keysight pioneered the best commercial ECSTM/ECAFM designed with ease of use and highest resolution for in situ imaging of electrochemical process. The latest addition of SECM*2 combined with AFM can sense redox reactions at the electrode surface at the micro / nano scale.

*2 SECM : Scanning ElectroChemical Microscopy

Environmental and temperature control

Keysight patented technology (MAC*3 mode) resolved the resolution challenge from very soft samples in fluid such as biological and polymer surfaces with very gentle tip force by oscillating the cantilever only. Morphology observation of biomaterials like cells, DNA or protein in the liquid can now be imaged easily with the highest resolution.. In addition, atmosphere like inert gases, organic vapor, humidity, and temperature are controllable.

*3 MAC : Magnetic AC

SMM mode

Carrier concentration measurement by detecting capacitance changes. P/N discrimination is also available from phase response to the bias polarity.

MAC mode

Keysight patented technology for vibrating the tip directly to achieve very small amplitude. It enables the high

resolution amplitude and phase imaging along with the topography of biological samples in liquid.

Temperature control

Heating and peltier sample plates are built with U shape compensation for minimizing the thermal drift for controlled temperature between -30 to +250 degree Celsius.

SECM mode

Imaging of the activity of the electrochemical reaction by measuring Faradaic current between the tip and sample is available in addition to morphology observation.

QuickScan

Two stage piezo-actuators realize navigation imaging speed up to 2sec/ frame @256x256 pixels. Fast feedback is automatically controlled during the imaging.

Interpolation and quantification of SMM by EM simulation

Good correlation between EMPro-FEM simulation and SMM mode measurement is confirmed*4. Simulation can be used for interpolation of observation results and quantitative meaning.