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8500B Field-Emission Scanning Electron Microscope

Data Sheets

Keysight 8500B

Field-Emission Scanning Electron Microscope

Low-voltage high-resolution imaging with integrated energy dispersive spectroscopy

Data Sheet

Overview

The new Keysight 8500B FE-SEM offers researchers a field-emission scanning electron microscope (FE-SEM) right in their own laboratory. This compact, innovative system is optimized for low-voltage imaging, extremely high surface contrast, and resolution typically found only in larger more expensive field-emission microscopes.

With a footprint of only 581x 670mm, the 8500B FE-SEM is easy to install and use. No dedicated facilities are required. The 8500B FE-SEM delivers consistent, reproducible performance and the industry’s lowest cost of ownership for an FE-SEM.

Ultimate Ease of Use

The 8500B FE-SEM’s powerful software package features an intuitive user interface designed for novice and expert users, an ideal choice for multiple-user environments. Password protection may be implemented to secure selected operating parameters and allow changes only by designated users.

Sample preparation and loading is both simple and fast. An X, Y, Z programmable stage lets users set specific coordinates, scan and then store the locations to repeat experiments with precision and confidence.

The electron source, the electron beam column, and the electron detector of the 8500B FE-SEM are all combined in a replaceable cartridge. When the longlasting electron source is finally depleted, the entire cartridge can be replaced to provide the 8500B FE-SEM with not only a new source of electrons, but a new prealigned electron beam column and a new microchannel plate detector.

Novel Design

Keysight’s patented technology employed in the 8500B FE-SEM embodies the successful miniaturization of the core technology in conventional scanning electron microscopes. The electrostatic lens design delivers consistent, repeatable performance without constant retuning due to hysteresis effects in the magnetic lenses in conventional SEMs.

The 8500B FE-SEM is optimized for low-voltage imaging and sub-10 nm resolution. Its thermal field-emission electron source provides high signal-to-noise ratios and consistent, long-lasting performance, while secondary and backscatter electron detection provides a rich data set for each sample.

Key Features

  • Resolution and imaging comparable to that of conventional much larger FE-SEMs
  • Topographic imaging mode to resolve sub-nanometer features with depths of field unachievable with traditional SEMs
  • Keysight’s patented miniature electrostatic lens design ensures repeatable performance without constant re-tuning
  • Variable low voltage greatly reduces charging and the need for sample coating
  • A fully integrated EDS system with qualitative and quantitative elemental analysis: choose standardless quantitative analysis, analysis with standards or a combination of standardless and standardized quantitative analysis
  • Keysight’s patented event-streamed spectrum imaging provides ultra-fast mapping and saves the full spectrum at every pixel for analysis and display
  • Export EDS results for off-line analysis
  • Changing samples is easy and fast with a pump-down time of less than 3 minutes
  • Programmable X, Y, Z stage allows users to set precise coordinates, scan, and save information for later work sessions

Enhanced Imaging

With multiple imaging techniques for improving surface contrast and increasing depth of field, the 8500B FE-SEM allows nanoscale features to be observed on a wide variety of nanostructured materials, including polymers, thin films, biomaterials, and other energy-sensitive samples on any substrate, even glass.

The system’s continuously variable imaging voltage is tunable from 500 to 2000 volts as an operational parameter rather than a setup choice. Operating at a low voltage essentially eliminates charging of non-conductive samples: there is no need to coat samples or operate at a low vacuum, which can mask nanoscale features and degrade resolution.

The 8500B FE-SEM utilizes a four-segment microchannel plate (MCP) detector to provide topographic imaging. This detector collects both backscattered and secondary electrons. It may be operated either in standard mode, adding together all the channels, or in topographic mode in which opposite sides of the detector are dynamically subtracted. This technique has been demonstrated to clearly resolve sub-nanometer atomic steps on the surface of crystalline substances such as polytypes of silicon carbide.

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