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Reliability of many Lithium niobate — LiNbO3 — optoelectronic devices depends on proper understanding of their deformation behavior under contact stresses that may occur during various fabrication steps. This study addresses this need by using a nanoindentation method to determine the critical shear stress needed for the transition from pure elastic to elastic-plastic deformation. The transition stresses determined during this study are lower than the theoretical shear strength, indicating the presence and distribution of defect nucleation centers those formed during the crystal growth or fabrication processes. We demonstrate here that (1012)[1011] twins form underneath the indented region, whereas dislocation based deformation is dominant further away from the center of the indent. Piezo-response force microscopy (PFM) revealed that while the dislocations nucleated during contact loading do not interact with existing ferroelectric domains, the deformation twins near the center of the indent form new domains with inverted polarization.
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