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5600LS AFM Enhanced Sample Versatility: 300mm Wafer Vacuum Chuck

Data Sheets

The Keysight Technologies, Inc. 5600LS AFM, already one of the most versatile atomic force microscopy systems on the market (with a fully programmable 200mm stage that allows complete access over a full 200mm in X/Y travel), has added yet another highly useful configuration. 

Previously, in order to image a 300mm wafer on an AFM, an engineer needed to “break” the wafer and place the portion of interest on the stage. Such destructive testing is not only costly, but prevents further processing of the device in question, thus limiting the use of atomic force microscopy for process development. However, by utilizing the new 300mm wafer vacuum chuck with a properly configured Keysight 5600LS AFM system, process engineers and failure analysis engineers can quickly obtain data via any of Keysight’s AFM modes to provide valuable process information and feedback without wafer breakage. 

Available as a special configuration, this new 5600LS AFM option entails shifting and rotating the X/Y stage, mounting the 300mm wafer vacuum chuck, and enabling an option within the Keysight PicoView control software that facilitates rotation of the camera image so as to simplify navigation and data acquisition.

AFM Instrumentation from Keysight Technologies 

Keysight Technologies offers high precision, modular AFM solutions for research, industry, and education. Exceptional worldwide support is provided by experienced application scientists and technical service personnel. Keysight’s leading-edge R&D laboratories are dedicated to the timely introduction and optimization of innovative, easy-to-use AFM technologies.

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