SMM Imaging of Dopant Structures of Semiconductor Devices

Application Notes

Scanning Microwave Microscope (SMM) has been engineered to leverage the outstanding accuracy and flexibility of a vector network analyzer (VNA) for impedance measurement, particularly for quantitative capacitance measurement on a dielectric sample. Furthermore, it can be engineered to measure differential capacitance (dC/dV) by applying a low-frequency (RF) modulation signal to the microwave (MW) measuring signal. The device for dC/dV measurement is called the dopant profile measurement module (DPMM) that can be attached to Keysight Technologies VNA instruments. The SMM system from Keysight consists of a standard AFM unit and a VNA unit [the performance network analyzers (PNA) series].It also includes a DPMM module and a lock-in amplifier for dC/dV measurement.

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SMM Imaging of Dopant Structures of Semiconductor Devices

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