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Product Fact Sheets
Keysight Technologies, Inc. laser Interferometer Systems enable precise measurement of position changes in many application areas. Keysight offers multiple product choices in all six system component areas (laser heads, directing optics, measurement optics, electronics and receivers, cables and compensation), allowing systems to easily be tailored to specific application requirements. Our complete documentation, along with factory applications support, help guide designers through some of the complexities associated with precision measurement systems.
Product Fact Sheet
Key features
Yaw measurement of X-Y stage
Component type Model number Selection impacts Pub# for more information
Laser heads 5517A, 5517B, 5517BL, 5517C, 5517CL, 5517D, 5517DL, 5517EL, 5517FL, 5517GL, 5519A/B, N1211A, N1212A, N1212B
Maximum stage velocity 5964-6190E: Laser and optics - Data Sheet
35990-5634EN: 5517x lasers - Product Fact Sheet
5990-9188EN: N1211A/N1212x - Product Fact Sheet
Beam directing optics and mounts
10567A, 10700A/B/C, 10700AV, 10701A, 10701A-C04, 10707A, 10710A/B, 10725A/B/C, 10726A, E1833C/E/G/J/M, E1834E/G/J/M/Z, N1209A
Number and placement of axes, power balance between axes, ease of system alignment
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