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Laser Interferometer Systems – Product Fact Sheet

Product Fact Sheets

Keysight Technologies, Inc. laser Interferometer Systems enable precise measurement of position changes in many application areas. Keysight offers multiple product choices in all six system component areas (laser heads, directing optics, measurement optics, electronics and receivers, cables and compensation), allowing systems to easily be tailored to specific application requirements. Our complete documentation, along with factory applications support, help guide designers through some of the complexities associated with precision measurement systems.

Product Fact Sheet

Key features

  • Long life laser source (> 50,000 hrs MTBF)
  • High stability laser source reduces measurement uncertainty
  • High reliability and exceptional repeatability reduce downtime
  • Multiple choices for all system components
  • Extensive optics guide for system designers
  • Flexible hardware interface enables easy connection to user systems
  • Software APIs and example programs ease creation of operating software

Yaw measurement of X-Y stage

Component type Model number Selection impacts Pub# for more information

Laser heads 5517A, 5517B, 5517BL, 5517C, 5517CL, 5517D, 5517DL, 5517EL, 5517FL, 5517GL, 5519A/B, N1211A, N1212A, N1212B

Maximum stage velocity 5964-6190E: Laser and optics - Data Sheet

35990-5634EN: 5517x lasers - Product Fact Sheet

5990-9188EN: N1211A/N1212x - Product Fact Sheet

Beam directing optics and mounts

10567A, 10700A/B/C, 10700AV, 10701A, 10701A-C04, 10707A, 10710A/B, 10725A/B/C, 10726A, E1833C/E/G/J/M, E1834E/G/J/M/Z, N1209A

Number and placement of axes, power balance between axes, ease of system alignment

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