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E5061B-3L3/3L4/3L5 LF-RF Network Analyzer with Option 005 Impedance Analysis Function

Data Sheets

E5061B-3L3/3L4/3L5 with Option 005; NA plus ZA in one box

To ensure the performance and reliability of electronic equipment, it is crucial to evaluate impedance characteristics of various electronic components used in the circuits. The E5061B-0051 is the impedance analysis firmware option for the E5061B-3L3/3L4/3L5 ENA Series LF-RF network analyzer.

The E5061B-005 combines network analysis (NA) and impedance analysis (ZA) functions in a single instrument with comprehensive component and circuit characterization in a broad frequency range, 5 Hz to 3 GHz.

Wide application coverage with three measurement techniques

To cover a broad range of impedance measurements for electronic components and circuits, the E5061B-005 supports three impedance measurement methods using both S-parameter and gain-phase test ports. You can choose appropriate measurement method depending on the impedance and frequency range of your application.

Reflection method

The reflection method using the S-parameter port 1 is a general-purpose impedance measurement suitable for low-to-middle impedance range. Keysight’s 7 mm component test fixtures can be connected via the 16201A 7 mm terminal adapter.

Similarly to conventional RF impedance analyzers, the measurement circuit is calibrated by performing the open/short/load (plus optional low-loss-C) calibration with the 7 mm calibration kit and eliminating errors caused by the 7 mm fixture with the fixture compensation functions (open/short compensation, plus optional fixture selection/port extension).

Series-thru method

The series-thru method using the gain-phase test port is also a general-purpose impedance measurement, that is suitable for middle-to-high impedance range in the low frequency range up to 30 MHz. You can connect Keysight’s 4-terminal-pair (4TP) component test fixtures directly to the gain-phase test port.

An accurate impedance measurement is obtained by performing the open/short/load calibration at the fixture with leaded or SMD 50 Ω resistors, which is provided by the option E5061B-720 50 ohm resistor set.

The shunt-thru method is specifically targeted at very low impedance measurements down to milliohm range. The most typical applications are power distribution networks (PDNs) and their associated components such as bypass capacitors and DC-DC converters.

The shunt-thru method using the S-parameter port 1 and 2 is suitable for PDN measurements up to GHz range. The shunt-thru method using the gain-phase test port is suitable for milliohm PDN measurements in the low frequency range, due to the ability to eliminate the ground loop errors.

Calibration and fixture compensation

Impedance calibration

In addition to the NA calibration capabilities such as response-thru, 1-port full, and 2-port full, the E5061B-005 provides the impedance calibration (Z-calibration) function for impedance measurements. The impedance calibration executes the open/short/load (and optional low-loss-C) calibration in the impedance domain after the measured

S-parameter or gain-phase ratio data is converted to impedance. This enables you to perform the open/short/load calibration in any impedance measurement method, not only in the reflection method but in the series-thru and shunt-thru methods.

Fixture compensation

The fixture compensation functions eliminate the measurement errors introduced by test fixtures, and is mainly used in the reflection method using the 16201A terminal adapter and 7 mm test fixtures.

The open/short (and optional load) compensation eliminates the fixture’s residual impedance and stray admittance. The electrical length compensation (selecting fixture type, or Z port extension) eliminates the phase shift error that occurs at 7 mm fixtures in the RF range.

Equivalent circuit analysis

The equivalent circuit analysis function extracts 3- or 4-element equivalent circuit parameters from the measured impedance trace for capacitors, inductors, and resonators.

It is also possible to simulate the impedance curves using the extracted parameters and overlay them onto the measured impedance traces, while adjusting the value of each parameter to fit the simulated trace to the measured trace.

DC biased impedance measurement

Unlike other network analyzers, the E5061B-3L3/3L4/3L5 is equipped with a built-in sweepable DC bias source (0 to 40 Vdc, max.100 mAdc) which superimposes a DC voltage onto the AC source signal at port 1 or LF OUT port.

This enables you to easily perform DC voltage biased impedance measurements for components that have a DC bias dependency, such as varicap diodes, large-capacitance MLCCs, and MEMS resonators.

Measurement Accuracy (SPD)

Definition

All specifications apply over a 23˚C ±5˚C range (unless otherwise stated) and 90 minutes after the instrument has been turned on. Supplemental performance data (SPD) represents the value of a parameter that is most likely to occur; the expected mean or average. It is not guaranteed by the product warranty.

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