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5600LS High Resolution Large Stage AFM

Data Sheets

Whether you work with large or small samples, the Keysight Technologies, Inc. 5600LS large-stage AFM is ready to deliver the atomic-resolution results you need. The modular 5600LS is the world’s only commercially available AFM system that allows imaging of both large samples (in air) and small samples (in air, or in liquid under temperature control) with an 8μm scanner.

The 5600LS utilizes the largest fully addressable and programmable stage on the market, 200mm x 200mm, as well as a low-noise AFM design. Samples up to 8” in diameter and 30mm tall are easily accepted by the 200mm vacuum chuck. The stage accommodates a 300mm wafer with repositioning.

To further expand the application versatility of the 5600LS system, new 300mm wafer and multi-sample 2-inch-wafer stages are now available. The 5600LS AFM provides researchers a perfect tool for many nanotechnology applications, including semiconductor, optoelectronics, materials science, and life science studies

Features and Benefits

  • New 300mm and multi-sample 2-inch-wafer stages expand application versatility
  • Largest fully addressable and programmable stage available (200mm x 200mm)
  • Special stage adapter allows use of sample plate to image small samples in liquid
  • System provides simple point-and-shoot AFM imaging based on optical view
  • Atomic-resolution imaging of small sample areas via AFM or STM scanners
  • Motorized optical focus affords excellent ease of use
  • Submicron positioning delivers outstanding accuracy
  • Accurate location mapping (0.5μm precision) ensures reproducibility
  • Exclusive SMM mode offers calibrated electrical measurement capabilities
  • PicoScript facilitates scripting to automate instrument setup and control
  • Plug-ins allow extension of force-volume and force curves

Applications

  • Semiconductor: silicon wafers, devices
  • Data storage: CDs, DVDs, hard drives
  • Optoelectronics and LEDs
  • Biological arrays
  • Polymer science
  • Materials science

Large and Small Samples

The 5600LS system’s programmable, motorized stage enables fast, accurate probe positioning for imaging and mapping both large and small specimens alike. Investigators can precisely locate and identify an area of interest and, with the coordinates stored, automatically reposition the sample quickly and accurately for further study. Multiple locations can be programmed into the system. For ultimate flexibility, the standard 200mm stage can accommodate either a single large sample or up to nine small samples with vacuum chuck (more can be held with tape), each of whose locations can be programmed into the system for automated, unattended measurement.

Innovative Design

The 5600LS combines stable, low-noise AFM imaging with high-speed, very flat, easily reproducible displacement over the stage travel range. The automated tip approach feature of the Keysight atomic force microscope minimizes damage to delicate sample structures. Motorized optical zoom and focus capabilities facilitate the automatic pre-approach, simplifying setting the initial tip-sample separation.

Scanners

Each of Keysight’s unique top-down scanners utilizes interchangeable nose cones that enable users to switch imaging modes quickly and conveniently. To deliver high-resolution imaging results, a patented pendulum scanner design eliminates artifacts in the image by keeping the relative position of the laser spot fixed in relation to the cantilever throughout the scan cycle. The open-top design of these scanners allows an unobstructed optical view of the cantilever and sample without sacrificing sample handling. A variety of robust, easy-to-use sample plates are offered in order to facilitate experiments in air, in liquid, or with electrochemistry.

The MAC Mode III Controller

The Keysight MAC Mode III Controller, provides 3 user-configurable lock-in amplifiers affording virtually limitless application flexibility. Additionally, it has internal expansion capability to allow the future addition of advanced imaging and analytical modes.

Imaging Modes

The 5600LS is compatible with contact mode, acoustic AC mode, phase imaging, STM, LFM, KFM/EFM, MFM, force modulation, current sensing, and Keysight’s MAC Mode — a gentle, nondestructive technique for imaging delicate samples in air or liquid. Scanning Microwave Microscopy (SMM) mode, the exclusive calibrated electrical characterization mode is available for the 5600LS.

Scanning Microwave Microscopy (SMM) Mode

Keysight Technologies’ unique SMM mode is particularly useful with the special stage chucks that are available for the 5600LS which combines the compound, calibrated electrical measurement capabilities of a microwave vector network analyzer (VNA) with the outstanding spatial resolution of an atomic force microscope. SMM outperforms the traditional AFM scanning capacitance mode (SCM) by offering both calibrated as well as quantitative results with the highest sensitivity and dynamic range.

Temperature Control

The 5600LS is compatible with Keysight’s industry-leading temperature control options. A patented thermal insulation and compensation design enables precise temperature control with excellent stability (±0.1°C or ±0.025°C; from 4°C to 250°C) for high-resolution AFM imaging.

Software

The 5600LS utilizes Keysight’s PicoView imaging and analysis software package to let users precisely program the system’s stage and perform simple point-and-shoot AFM imaging of an area of interest based on an optical view. Keysight PicoScript is an optional scripting interface package that greatly enhances the capabilities of PicoView. Scripts can be written to automate tasks and create custom experiments. The built in plug-in architecture in PicoView provides unparalleled flexibility for force distance and force volume measurements.

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