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The Impedance Measurement Handbook-4th Edition - Application Note
This 140 page handbook is Keysight Technologies's most detailed information on the basics of impedance measurements using Keysight Technologies's LCR meters and impedance analysers. It provides the theory, test set-upinformation, error discussion, etc.

Application Note 2013-09-10

Multifrequency C-V Measurements of Semiconductors (AN 369-5)
The Keysight 4284A has a DC bias capability of +/- 40V and a wide frequency cover age of 20 Hz - 1 MHz, which enable us to make semiconductor C-V measurements.

Application Note 2008-12-10

Evaluation of MOS Capacitor Gate Oxide C-V Characteristics Using the Keysight 4294A(PN4294-3)
As a result of extremely high integration of logic LSIs, MOS FETs with gate lengths of 0.1 mm or less have been produced recently. A consequence of this miniaturization has been the need for very thin gate oxide layers.

Application Note 2003-06-26