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Laser Interferometers & Calibration Systems

Keysight Technologies is a world leader in the design and manufacture of laser interferometry systems, advanced electronic measurement systems, high-precision optical components, complex monolithic optics (CMOs), and opto-electronic systems design for the most demanding metrology applications. Keysight systems offer high precision in a wide dynamic range, the ability to simultaneously measure a position with multiple degrees of freedom, and the highest accuracy available in both air and vacuum systems.

With more than 11,000 systems delivered, our modular interferometry solutions set the standard for precision measurement of the most challenging applications in semiconductor lithography, aerospace/defense, metrology, and manufacturing. Moving forward, Keysight will continue to innovate systems that will enable the future in each of these markets.

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Laser Interferometer Electronics - Quick Fact Sheet
This two-page quick fact sheet highlights the key features and specifications for Keysight’s Laser Interferometer Electronics.

Promotional Materials 2012-07-24

PDF PDF 737 KB
5530 Laser Calibration System Data Sheet
System specifications for 5530 laser calibration system.

Data Sheet 2012-07-18

PDF PDF 1.06 MB
5530 Laser Calibration System Brochure

Brochure 2012-07-18

PDF PDF 659 KB
E1738A Air Temperature/Pressure/Humidity Sensor Data Sheet
This environmental sensor is used with the Keysight E1736A USB Sensor Hub as part of the 5530 Laser Calibration System.

Data Sheet 2012-07-18

PDF PDF 91 KB
5530 Laser Calibration System Components Selection Guide

Selection Guide 2012-07-11

PDF PDF 2.69 MB
55290A Angular Position Measurement Kit Data Sheet

Data Sheet 2012-07-04

PDF PDF 163 KB
55281A Angular Optics Kit

Data Sheet 2012-07-04

PDF PDF 110 KB
10768A Diagonal Measurement Kit Data Sheet

Data Sheet 2012-07-04

PDF PDF 90 KB
E1735A USB Axis Module Data Sheet
The Keysight E1735A USB Axis Module is the electronic interface for the 5519A/B laser head used in the Keysight 5530 Laser Calibration System.

Data Sheet 2012-07-04

PDF PDF 87 KB
E1737A Material Temperature Sensor Data Sheet
This material temperature sensor is used with the Keysight E1736A USB Sensor Hub as part of the 5530 Laser Calibration System.

Data Sheet 2012-07-04

PDF PDF 74 KB
E1736A USB Sensor Hub Data Sheet

Data Sheet 2012-07-04

PDF PDF 88 KB
55282A Flatness Accessory Kit
With 5530 and 55281A, the kit measures flatness in 3 dimensions of a surface plate and machine bed, or measures way straightness of solid objects, such as machine tool ways and master straight edges.

Data Sheet 2012-07-04

PDF PDF 111 KB
55290B Rotary Axis Measurement Kit

Data Sheet 2012-07-04

PDF PDF 189 KB
55280B Linear Measurement Kit Data Sheet

Data Sheet 2012-07-04

PDF PDF 115 KB
Are you getting the most from your machine tool operations?

Brochure 2012-06-18

PDF PDF 172 KB
Laser Interferometer Measurement Optics - Quick Fact Sheet
Keysight offers a wide selection of measurement optics for use with Keysight Laser Interferometer systems.

Promotional Materials 2012-03-14

PDF PDF 424 KB
Laser Interferometer System Cables - Quick Fact Sheet
This two-page quick fact sheet highlights the key features and specifications for Keysight’s Laser Interferometer System Cables.

Promotional Materials 2011-05-12

PDF PDF 552 KB
Verify Machine Performance with the World Standard for Laser-based Metrology
Keysight 5529A Dynamic Calibrator

Brochure 2005-11-15

PDF PDF 4.87 MB
Laser and Optics User's Manual, Chapter 5, Laser heads
Part of the Laser and Optics User's Manual available in print form as p/n 05517-90045 and CD form as 05517-90063.

User Manual 2002-07-01

PDF PDF 763 KB
Laser and Optics User's Manual, Chapter 3, System design considerations
Part of the Laser and Optics User's Manual available in print form as p/n 05517-90045 and CD form as 05517-90063.

User Manual 2002-07-01

PDF PDF 796 KB
Complete, PC-compatible, Closed-loop Laser Positioning
Data sheet for the 10889B, 10885A, 10886A, 10884A products

Data Sheet 2001-03-21

PDF PDF 1.62 MB
Achieving Maximum Accuracy and Repeatability
Covers positioning errors due to lasers, electronics, optics, alignment, and environmental conditions

Application Note 2001-03-21

PDF PDF 734 KB
5529A Dynamic Calibrator

Data Sheet 2001-03-16

PDF PDF 284 KB